X-Ray Spectrometry in Electron Beam Instruments 124 HEATON (1979

HEATON (1979

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X-Ray Spectrometry in Electron Beam Instruments 124 HEATON (1979From its early days in the 1950s, the electron microanalyzer has offered two principal ways of obtaining x ray spectra: wavelength dispersive spectrometry (WDS), which utilizes crystal diffraction, and energy dispersive spectrometry (EDS), in which the x ray quantum energy is measured directly. In general, WDS offers much better peak separation for complex line spectra, whereas EDS gives a higher collection efficiency and is easier and cheaper to use.